POM 150R

POM 200R

强光检测模组 Bright Light Inspection Module

Lamina 202

缺口识别模组 Notch Identification Station

Lamina 203

条码阅读器模组 Bar Code Reader Station

Lamina 204

掩模厚度测量模块 Mask Thickness Measurement Module

Lamina 205

Lamina 206

PLM 200R